MEMS Characterization
- Fourier Transform Infrared (FTIR) (FTS 3000MX)
- Philips XL20 Scanning Electron Microscope (Philips XL 30 Series)
- VEECO surface profiler (WYKO NT1100)
- Leica Material Workstation (Leica DMLA)
- Thickness Mapping System (Filmetrics F50-2000)
- DACTRON shaker
- Probe station (Micromanipulator)
- PZT Testing
- Ellipsometer (Melles Griot 05-LHP-321)
- SECA Microscope
- Osciloscope, Le Croy
- TENCOR surface profiler
- Laser Displacement Meter
- LCR Meter
- IV-CV Meter
- KEYENCE Displacement Meter