Fabrication

Deposition

1. E-Gun
2. Electron Beam Evaporator
3. Dip CuaGer
4. Spin Coater
5. Furnace

Lithography

1. Photo Luminescence Spectrometer
2. Fluorescent & Luminance Measurement

Other machines / facilities

1. Glove Box System
2. Helium HC70 Compressor Unit
3. Tape Bonding
4. Material printer