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Effect
of Al and N Doping on Structural and Optical Properties of Sol-gel Derived ZnO
Thin Films
(Kesan Pengedopan Al dan N
Terhadap Struktur dan Sifat Optik Filem Nipis ZnO yang Disediakan Melalui
Kaedah Sol-Gel)
Chatpong
Bangbai1*, Krisana Chongsri2, Wisanu Pecharapa3,4 & Wicharn Techitdheera1
1School of Applied Physics, King Mongkut’s
Institute of Technology Ladkrabang
Ladkrabang,
Bangkok, 10520, Thailand
2Department of Applied Physics, Faculty of
Science and Technology
Rajabhat
Rajanagarindra University, Chachoengsao, 24000, Thailand
3College of Nanotechnology, King Mongkut’s
Institute of Technology Ladkrabang
Ladkrabang,
Bangkok 10520, Thailand
4ThEP Center, CHE, 328 Siayuthtaya Rd. Bangkok,
10400, Thailand
Diserahkan: 7
Januari 2012/Diterima: 21 Mei 2012
ABSTRACT
In this work, the preparation of
ZnO, N-doped ZnO (NZO), Al-doped ZnO (AZO)
and Al, N-doped ZnO (ANZO) thin films by the sol-gel
spin-coating method is reported. The structural properties and surface
morphologies of films were characterized by X-ray diffraction (XRD)
and field emission scanning electron microscope (FE-SEM).
The optical properties of the films were interpreted from their transmission
spectra using UV-VIS spectrophotometer. The XRD and SEM results disclosed that the crystallization quality and grain size
of as-prepared films were highly influenced by N and Al doping. UV-VIS spectrophotometer
results indicated that Al and N additives could significantly enhance the
optical transparency and induce the blue-shift in optical bandgap of ZnO films.
Keywords: Al doping; N doping; sol-gel;
ZnO thin films
ABSTRAK
Di dalam kajian ini, penyediaan saput tipis ZnO, N-terdop ZnO (NZO), Al-terdop ZnO (AZO)
dan Al, N-terdop ZnO (ANZO) menggunakan
kaedah salutan-putaran sol-gel dilaporkan. Sifat-sifat struktur dan morfologi
permukaan filem dicirikan menggunakan pembelauan sinar-X (XRD)
dan mikroskop imbasan elektron pancaran medan (FE-SEM). Sifat optik filem tersebut diperoleh
daripada spektrum transmisi dengan menggunakan spektrofotometer UV-VIS.
Keputusan XRD dan SEM membuktikan bahawa kualiti penghabluran dan saiz butiran filem
yang disediakan sangat dipengaruhi oleh pendopan N dan Al. Keputusan UV-VIS spektrofotometer menunjukkan bahawa bahan tambahan
Al dan N dapat meningkatkan kelutsinaran optik dan menpengaruhi anjakan biru
antara jurang jalur optik filem ZnO secara signifikan.
Kata kunci: Pengedopan Al, pengedopan N; :saput tipis ZnO; sol-gel
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*Pengarang untuk surat-menyurat; email: chatpong_b@windowslive.com
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