Sains Malaysiana 38(1):
91-94(2009)
Microstructural Characterization of Au-In Thin Film
Deposited by Electron Beam Evaporation
(Kajian Mikrostruktur Filem Nipis Au-In Diendapkan
Menggunakan
Penyejatan Sinar Elektron)
Norliza Ismail, Muhammad
Azmi Abdul Hamid & Azman Jalar
Pusat Pengajian Fizik
Gunaan, Fakulti Sains dan Teknologi
Universiti Kebangsaan
Malaysia, 43600 UKM Bangi
Selangor, Malaysia
Received: 8 April 2008 /
Accepted: 6 June 2008
Abstract
The microstructure and phase formation of Au-In thin film
deposited by e-beam evaporation technique has been studied. Single crystals of rocksalt were used as the substrates. The chamber pressure during
deposition was about 2.5 × 10-5 torr and
substrate temperature was 35°C. Three types of samples were prepared namely Au, In
and Au-In thin films. Microstructure and chemical composition of these thin
films were characterized by transmission electron microscopy (TEM) and X-ray
photoelectron spectrometer (XPS) respectively. TEM micrograph reveals island
structures for both Au and In thin film on the rocksalt substrate, with the In island size distribution is
about 9-30 nm compared to Au island in the range of 3-10 nm. The growth of
islands instead of smooth film indicates that Au and In thin films follow the Volmer-Weber growth mode. However,
island structures were not present on Au-In thin films which most probably follow
the Frank van de Merwe growth mode. XPS analysis
indicates intermetallic compound was not present in
the Au-In thin film suggesting that diffusion process in the interface of Au
and In films is minimal.
Keywords: Au-In
thin film; e-beam evaporation; microstructure; TEM; XPS
Abstrak
Mikrostruktur dan pembentukan fasa bagi filem nipis Au-In yang diendapkan
menggunakan teknik penyejatan alur elektron telah dikaji. Garam batu berhablur tunggal telah digunakan sebagai substrat. Tekanan kebuk semasa pengendapan adalah sekitar 2.5 x 10-5 torr dan suhu substrat adalah pada 35°C.
Tiga jenis sampel telah disediakan iaitu filem nipis Au, In dan Au-In. Mikrostruktur dan komposisi kimia filem nipis ini masing-masing
dianalisis menggunakan mikroskop transmisi elektron (TEM) dan spektrometer fotoelektron sinar-X (XPS). Mikrograf
TEM menunjukkan struktur pulau pada kedua-dua filem Au dan In yang diendapkan di
atas substrat garam batu di mana pulau In mempunyai taburan saiz sekitar 9-30
nm berbanding dengan pulau Au iaitu 3-10 nm. Pertumbuhan berbentuk pulau berbanding
lapisan sekata menunjukkan Au dan In tertumbuh mengikut mod pertumbuhan Volmer-Weber. Walaubagaimanapun struktur pulau
tidak kelihatan pada filem nipis Au-In di mana kemungkinan pertumbuhan filem Au-In
adalah mengikut mod pertumbuhan Frank-van der Merwe. Analisis XPS mendapati
sebatian antaralogam tidak terbentuk di dalam filem nipis Au-In, yakni mencadangkan
proses resapan pada antara muka filem Au dan In adalah pada tahap minimum.
Kata kunci: Filem
nipis Au-In; mikrostruktur; penyejatan alur
elektron; TEM; XPS
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