Sains
Malaysiana 41(3)(2012): 339–344
Effect of Annealing Temperature of
Sol-Gel TiO2 Buffer Layer on Microstructure
and Electrical Properties of Ba0.6Sr0.4TiO3 Films
(Kesan Suhu Sepuhlindap Lapisan Penimbal
TiO2 Sol-Gel Terhadap Mikrostruktur
dan Sifat Elektrik Filem Ba0.6Sr0.4TiO3)
N.B. Ibrahim*, E. Yusrianto, Z. Zalita
& Z. Ibarahim
School of Applied Physics, Faculty of
Science and Technology
Universiti Kebangsaan Malaysia, 43600
UKM Bangi, Selangor D.E. Malaysia
Diserahkan: 9 Mac 2011 / Diterima: 19
September 2011
ABSTRACT
Ba0.6Sr0.4TiO3 (BST) thin films were prepared on TiO2 buffer layers. The buffer layers were
prepared using sol-gel method, followed by annealing process at different
temperature from 300 to 55oC with 50oC interval for 30 min
in air. The microstructure and
electrical properties of BST were then investigated. Increasing the annealing
temperature increased. The buffer layer thickness BST films prepared on thicker
buffer layer showed improved crystallinity. Without the buffer layer, BST
crystallization cannot occur at 700 oC. However with buffer layer,
700 oC is sufficient for the process to occur. The BST grain size
increased with the buffer grains increment. The existence of TiO2 buffer layer increased the current density. The dielectric constant, εr´
and dielectric loss were not affected much by the buffer layer except at
frequency around 1 kHz that showed an increment in the εr’ value with the
increment of the annealing temperature.
Keywords: Annealing; buffer layer; electrical
properties; sol-gel
ABSTRAK
Filem
nipis Ba0.6Sr0.4TiO3 (BST) telah disediakan di
atas lapisan penimbal TiO2. Lapisan penimbal disediakan dengan kaedah
sol-gel, diikuti dengan proses sepuh lindap pada suhu yang berbeza daripada 300
hingga 550oC dengan sela 50oC selama 30 min dalam udara
biasa. Mikrostruktur dan sifat elektrik BST telah dikaji. Kenaikan suhu sepuh
lindap meningkatkan ketebalan lapisan penimbal. Filem BST yang disediakan di
atas lapisan penimbal yang lebih tebal mempunyai penghabluran yang lebih
sempurna. Tanpa lapisan penimbal, penghabluran BST tidak boleh berlaku pada
suhu 700 oC, namun begitu dengan adanya lapisan penimbal, 700 oC
sudah mencukupi untuk membenarkan proses penghabluran berlaku. Saiz butiran BST
meningkat dengan peningkatan butiran penimbal. Kewujudan lapisan penimbal TiO2 jugameningkatkan ketumpatan arus. Namun pemalar dielektrik, εr´ dan
kehilangan dielektrik tidak begitu dipengaruhi oleh lapisan penimbal kecuali
pada frekuensi lebih kurang 1 kHz yang menunjukkan penambahan εr’ dengan
peningkatan suhu sepuh lindap.
Kata kunci:
Lapisan penimbal; sepuh lindap; sifat elektrik; sol-gel
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*Pengarang
untuk surat-menyurat; email: baayah@ukm.my
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