Sains Malaysiana 37(1):  85-88(2008)

Kesan Suhu Sepuh Lindap ke atas Mikrostruktur,

Morfologi Permukaan dan Komposisi Filem Nipis Ba_0.5Sr_0.5tio₃

yang Disediakan dengan Kaedah Sol Gel

(The Effect of  Annealing Temperature on the Microstructure, Surface 
Morphology and Compositions of Ba0.5Sr0.5TiO3 Thin Films Prepared
by the Sol-Gel Method)

Rahmi Dewi, Noor Baa'yah Ibrahim & Ibrahim Abu Talib

Fakulti Sains & Teknologi, Universiti Kebangsaan Malaysia

43600 UKM Bangi, Selangor D.E. Malaysia

 Diserahkan:  6 Februari 2007 / Diterima:  12 Jun 2007

ABSTRAK

Pada umumnya, proses sol–gel melibatkan peralihan dari sistem larutan cecair iaitu “sol” ke fasa pepejal yang disebut “gel”. Dalam kajian ini filem nipis Ba_0.5Sr_0.5TiO₃ (BST) telah dihasilkan dengan menggunakan kaedah sol-gel menggunakan Ba(C₄H₆O₄), Sr(CH₃CO₂)₄ dan (Ti(OCHCH₃)₂)₄. Filem yang terhasil disepuhlindap pada suhu 600⁰C, 650⁰C dan 700⁰C selama 1 jam dalam persekitaran udara biasa. Mikrostruktur, morfologi dan komposisi unsur filem tersepuhlindap ditentukan  menggunakan XRD, AFM dan EDS. Dari hasil pencirian diperoleh semakin tinggi suhu sepuhlindap penghabluran filem dan kekasaran permukaan semakin meningkat. Nisbah Ba/Sr berkurangan dengan kenaikan suhu sepuhlindap.

Kata kunci: Filem nipis Ba_0.5Sr_0.5TiO₃; kaedah sol-gel; suhu sepuhlindap

ABSTRACT

In general, the sol-gel process involves the transition of a solution system from a liquid "sol" into a solid "gel" phase. In this study, Ba_0.5Sr_0.5TiO₃ (BST) thin films have been prepared by the sol-gel technique using starting materials, Ba(C₄H₆O₄), Sr(CH₃CO₂)₄ and (Ti(OCHCH₃)₂)₄. The thin films were annealed at temperature at 600⁰C, 650⁰C and 700⁰C for 1 hour in atmosphere. The microstructure, morphologies and compositions of the films that were annealed were determined using XRD, AFM and EDS techniques. The results show that increasing the annealing temperature increased the crystallinity and surface roughness of the films. The Ba/Sr ratio decreased when the annealing temperature increased.

Keywords:  Ba_0.5Sr_0.5TiO₃  thin films; sol-gel technique; annealing temperature

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